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Vacuum Measurement Compact Filament Pirani Gauge Increases Process Efficiency

Editor: MA Alexander Stark

The ability to reliably measure and control the vacuum level in a given vacuum process is key in creating the highest possible efficiencies. This is why Leybold has developed the Thermovac TTR-RN series, a new compact filament Pirani gauge for all vacuum applications requiring a measurement range from atmosphere to 1e-4 mbar (7.5e-5torr).

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The Thermovac TTR-RN series offers increased process efficiency and reliability.
The Thermovac TTR-RN series offers increased process efficiency and reliability.
(Source: Leybold)

With compact dimensions and rugged filaments, the Thermovac TTR-RN series of filament Pirani gauges is equally suited for analytical applications and robust industrial processes. This latest series from Leybold is designed to simplify monitoring of small and large vacuum systems and thus allow users to control and scale them in a more targeted manner.

The core element of the measuring device is its new filament technology. By advancing filament technology the company increases the sensitivity and thus the accuracy of measurements. This has been coupled to high end electronics and interfaces, including a bright light ring which immediately indicates the pressure range locally. With reliable and reproducible measurement results, even the roughest vacuum processes can be optimized easily and quickly. As a result, dead process time is reduced and the throughputs in the vacuum processes are increased.

For standard processes the Thermovac TTR-RN series is equipped with a tungsten filament, while for harsher process applications a corrosion resistant platinum variant is available. To further increase the reliability of the gauge a filter is integrated into the flange, blocking particles that would otherwise damage the filament.

The es series is available with many flexible options to suit user needs — starting with standard or corrosion-resistant measuring cells which can be combined with an array of flange types, communication protocols (0-10v, RS232, RS485) and output scaling options.

Regular maintenance can be easily carried out by end users themselves and without the need for any special tools. To separate the two halves of the meter only take a simple pull of the pin on the side.

Both the cell and individual electronic components are available as spare parts. Based on its many years of experience in the field of vacuum measurement, Leybold can also ensure the individual application and after-sales support required in each case.